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nền tảng đĩa màuDZҪƳڹֻӷľ˼·ȥûбҪļӰǿԹԤԺͳЭѧļӰ˵ԼʱعҸ̨лĸнʦ俻˵ѧѧѡŵȫʱѧУǿӦսҲӭ֪ע⵽쵼˷ʱҲŷ޽мͣѡϣŷҵʱȽ϶Ͼй·;ңԶ쵼˷г൱ڷ˴

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뵳УоԱҵ˵һҹʳƷѽṹũƷϴũƷŻҹʳƷṹԪһйги߶Ⱦйг÷ݶڹҪԼƷͷľйԸ⹺ʱй벼ɷûлָ⽻ϵҲûֱɵĺڻǵڹڳصʱԱĿĵعҶ˽ѯ˰

2003.052005.11ʡ칫һοԱ2001.092003.07մѧֵѧרҵоγ̽ްѧϰ200412»ѧ˶ʿѧλý17ձǰоȫоƬ豸̡ASML̨ȽEUVߣֵ̻1.2ԪĿǰҵѴɹʶʹEUV̻ʹ뵼оƬ7nm5nmʱϢ̨൱оȥȫ豸2019ǰ

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